Nano-hemisphere structure array mold manufacturing method and its mold

Nano-hemisphere structure array mold manufacturing method and its mold

Abstract

In this invention, we propose a replica mold fabrication method for nano-hemisphere arrays by metal electroforming using the highly ordered nano-hemisphere array of the barrier-layer surface of an anodic aluminum oxide (AAO) membrane as the master mold. The fabrication process includes AAO film preparation, barrier-layer surface modification, metal thin film deposition, electrode annealing, device packaging, electroforming of metal, and AAO etching. Using the metal replica mold, nano-hemisphere arrays of polycarbonate (PC) can be produced on large scale by hot embossing, nano-patterned poly(lactic-co-glycolic acid) (PLGA) tissue engineering scaffolds can be fabricated by casting.

Year:  2013

Country:  TW

Doc No:  201300309

 

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